Magnetron priming by multiple cathodes

A Faceted Magnetron Concept Using Field Emission Cathodes

Characterization and Performance of LiFePO4 Thin-Film Cathodes Prepared with Radio-Frequency Magnetron-Sputter Deposition

Characterization and Performance of LiFePO4 Thin-Film Cathodes Prepared with Radio-Frequency Magnetron-Sputter Deposition Jian Hong,* Chunsheng Wang,** Nancy J. Dudney,** and Michael J. Lance Department of Chemical Engineering, Tennessee Technological University, Cookeville, Tennessee 38505, USA Department of Chemical and Biochemical Engineering, University of Maryland, College Park, Maryland 2...

Oleophobic optical coating deposited by magnetron PVD

Thin oxinitride films of Zn-Sn-O-N and Si-Al-O-N were deposited on glass by reactive magnetron sputtering at various nitrogen-to-oxygen ratios. Nitrogen added to oxygen led to decrease of the surface roughness and increase of oleophobic properties studied by the oil-drop test. The best oleophobity was obtained for Zn-Sn-O-N oxinitride at Zn:Sn=1:1 and N:O=1:2. Improved oleophobic properties wer...

CrNx Films Prepared by DC Magnetron Sputtering and High-Power Pulsed Magnetron Sputtering: A Comparative Study

CrNx (0 ≤ x ≤ 0.91) films synthesized using highpower pulsed magnetron sputtering, also known as high-power impulse magnetron sputtering (HiPIMS), have been compared with those made by conventional direct-current (dc) magnetron sputtering (DCMS) operated at the same average power. The HiPIMS deposition rate relative to the DCMS rate was found to decrease linearly with increasing emission streng...

Nanostructured Cathodes